Membrane-type Surface-stress Sensor (MSS)

The NANOSENSORS™ MSS is a piezoresistive nanomechanical sensor: a silicon membrane platform supported with four beams with integrated piezoresistors. This MEMS sensor is very versatile and primarily designed for R&D in the fields of electronic nose/ odor sensing/ olfactory system. It can also be utilized for material assessment application, measurements of physical parameters in, for example, torque magnetometry.


The receptor material coated on the membrane determines the sensitivity and the specificity of the individual sensor.

In “nose” applications, a receptor material coated on the membrane determines the sensitivity and the specificity of the individual sensor. Researchers can coat the membranes with a coating of their choice and the membrane will mechanically react to the surface-stress caused by the absorption/adsorption of a chosen target substance.


Researchers can create their own electronic module to collect the numerical data of the sensor responses or acquire the NANOSENSORS™ MSS-8RM. The latter is a basic electronic module to operate and to readout NANOSENSORS™ MSS that can be integrated in the researchers own set-up.


References Physical measuremt applications
References
Olfactory applications

Sensor Chips: MSS-1K series


How it works:


Surface Stress Applications: Upon absorbing volatile organic compounds (VOCs), the receptor layer coated on the membrane yields surface stress and deforms the membrane.


Force Applications: In a material assessment application, a force generated by a sample glued on the membrane deforms the membrane. The piezoresistors detect the deformation.

Code SD-MSS-1K SD-MSS-1K2G
Membrane diameter [μm] 1000
Membrane thickness [μm] 5.2 (typical) 2.5 (typical)
Chip dimensions [mm] app. 5.5 x 2.0 x 0.3 app. 5.5 x 2.5 x 0.3
Resistance value [kΩ] 2 – 15 2 – 6
Electric configuration Full bridge, 4 pads with 0.5 mm pitch
Coating (functionalization) No
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MSS 8 Channel Readout Module: MSS-8RM


MSS-8RM is a USB-powered basic electronic module to operate and to readout NANOSENSORS™ MSS, up to 8 sensors simultaneously, under a hardware configuration for electronic nose/ odor sensing.

MSS-8RM contains two air pumps and users can examine self-prepared MSS under different gas flow conditions. MSS-8RM is designed as simply as possible so that users can learn about a basic E-nose system and further improve the system performance.



Please note that MSS-8RM does not include any data processing functions to distinguish one sample from the other. You will get raw numerical data of the sensor responses under different conditions as final output.

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